White light interferometer WLI FL
FRT, Fries Research & Technology
The FRT WLI FL is an optical 3D field-of-view sensor based on the measuring principle of white light interferometry. It features fast, large area topography measurements with excellent height resolution in the sub-nanometer range. In Phase-Shift-Mode (PSI), the sensor is ideal for roughness measurements on flat surfaces. Topography measurements are conducted with high resolution in vertical scanning mode (VSI). Typical applications are the investigation of micro-mirrors, lenses, MEMS, microfluidics and microelectronics.
