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Semiconductor resin KrF
photosensitivehigh-resistancehigh thermal stability

semiconductor resin
semiconductor resin
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Characteristics

Applications
for semiconductors
Other characteristics
high-resistance, photosensitive, high thermal stability

Description

GKR series are positive tone KrF photoresist systems that cover a wide range of applications. • Non PFOS/PFAS materials • High aspect ratio application • Superior resistance to plasma etching & ion implantation • Wide process windows • Low defect levels • Long term stability • Vertical profiles • Wide thickness coverage

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