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semiconductor resin / high-resistance / high thermal stability
GKR series Fujifilm NDT Systems

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Characteristics

  • Applications:

    for semiconductors

  • Other characteristics:

    high-resistance, high thermal stability

Description

The Gkr series, which are manufactured by Fujifilm, are positive tone, KrF photoresist systems that have been developed to provide efficient, and reliable quality performance. It does not contain any PFOS or PFAS materials. It also has minimal defect levels, a long term stability, vertical profiles, and as well as having a wide thickness coverage.