KF Fittings found in semiconductor wafer processing systems, such
as CVD and etch, pose a significant seal design challenge due to
the typically high operating temperature of these applications. At
high temperatures seals tend to expand, therefore causing high-
compression forces on the seal. As a result the seal is stressed and
The Greene, Tweed KF Fitting Seal, designed with a unique double-
obe geometry for use in KF Fittings, improves compression set in
high-temperature applications. Greene, Tweed's KF Fitting Seal
offers superior resistance to a variety of semiconductor processing
environments and can be used with both stainless steal and
aluminum components without seal deterioration or metal corrosion.
KF Fitting Seals are available in all standard sizes.