Sizes From 5 to 400 mm
Radius of Curvature From flat to 300 mm
Roughness Down to 0.05 nm (0.5*) rms depending on material
Wavelengths 193 nm to 5 microns
Flatness to l/40
Materials Typical optical materials including fused silica, BK7, silicon, sapphire, low expansion glasses, silicon carbide