1. screen Screen diameter(mm): ?³350 Rotary range: 0�?~360�? Rotary angle resolution 1�f Rotary angle accuracy 4�f 2. work-stage Size of work-stage: 326�~150mm Range for X, Y, Z: X=200mm Y=80mm Z=100mm Resolution for X,Y: 0.001mm Weight: 5kg 3. technical parameter Accuracy: (3 L/75)um �gL�h is measuring length of work-piece( Unite :mm) 4. over size for machine 746�~420�~980mm 5. weight 105kg 6. objective 10�~ 20�~ 50�~ 100�~