The L12542 is a newly developed electrostatic charge remover that makes use of VUV (vacuum ultraviolet) light. Due to its wide irradiation angle about 3 times larger than our current VUV light source, the L12542 efficiently removes electrostatic charges over large areas in depressurized or vacuum environments. Up until now two or more VUV light sources were needed to neutralize electrostatic charges in large areas due to their limited irradiation angle. The L12542 solves this problem and efficiently neutralizes large areas in a vacuum.
FEATURES
•Large irradiation (neutralizing) area
•Highly efficient ion génération in a vacuum
•No air flow needed
•No overshoot (generates no opposite-polari-ty static charges)
•No dust and electromagnetic noise emissions
•Long life
APPLICATIONS
•Dechucking of electrostatic chucks
•Semiconductor manufacturing equipment (vacuum process)
•LCD manufacturing equipment
•Organic EL manufacturing equipment
•Hard disk manufacturing equipment
•Film manufacturing equipment