Clean room SCARA robot
AR-W130CL/AR-W250VHCL HIRATA AMERICA

Features

Small footprint does not disturb laminar flow in the clean room.
High performance robot achieves higher throughput.
Wafer turner option allows you to process reverse side of wafer.
No lubrication is required saving you maintenance costs.

System Integration

Our Clean Room Modules are developed through our long and in-depth experience to be easily and most efficiently integrated in automation systems.

Your favorite controller is ready to communicate with the Hirata robot controller. No need to learn new programming language. Simplified teaching and control method will shorten your time to deploy the process of automation.
Max. 12 axes can be controlled by a single controller.

Peripherals

FOUP/Autodoor FOSB Opener, Prealigner and SMIF Pods Opener are available as a part of clean modules system. These peripherals can be integrated with Hirata controller.