Analytical field emission scanning electron microscope (FE-SEM)
SU70 Hitachi High-Technologies Europe

The SU70 large chamber analytical field emission scanning electron microscope features a unique dual mode objective lens coupled with high probe current from a new Schottky emission electron gun allowing incredibly fast, stable analysis.The dual electron-optical modes: High Resolution semi-inlens imaging with ExB signal filtering & detection, and a Field-Free mode with no magnetic field between sample and objective lens. The Ultra-high resolution in-lens operation provides ultimate imaging while the Field-Free mode gives optimum EBSP and magnetic sample analysis. The patented EXB detector configuration not only significantly improves collection efficiency and signal-to-noise ratio in the images, but allows different signal combinations to be collected, giving a wealth of different information from the sample. The versatile new specimen chamber features 15 accessory ports, allowing a multitude of analytical accessories to be mounted simultaneously. Accessory possibilities include EDX, WDX (both wavelength and PBS), EBSP, cathodoluminescence, YAG backscattered detector, STEM, Cryo-Stage and chamberscope.