Analytical field emission scanning transmission electron microscope (FA-STEM)
HD-2700 Hitachi High-Technologies Europe

The HD-2700 is the top of the range STEM, featuring optional spherical aberration correction Cs (developed in collaboration with CEOS GmbH) to offer significantly improved resolution and analytical sensitivity. The Cs corrected HD-2700 can achieve a resolution of 0.144 nm in dark-field STEM mode. The HD-2700 has applications in materials science, semiconductors and nanotechnology, both in research and development and quality control. High speed, high sensitivity EDX analysis is possible since the HD-2700 has 10x greater probe current than other systems. This allows extremely rapid acquisition of EDS spectra and elemental mapping, even for elements at low concentration. Electron Energy Loss Spectrometry (EELS) is also available for analysis with enhanced spatial resolution. The CFE HD-2700 has an energy resolution of 0.2eV for the Ultimate in EELS analysis. Extremely versatile imaging allows simultaneous multiple-image acquisition and display, with a wide variety of combinations, including SE/BF. SE/DF, BF/DF, DF/EDX, DF/EELS and live diffraction/imaging.