Air bearing XY stage HIWIN

Planar Motors
XY movements on an air bearing through a planar-servo-stepping motor with integrated distance measurement. Can be operated above head and even in a vacuum.

Planar Servo Motors LMSP
The planar motors LMSP have integrated distance measurement sensors and work with position control (closed loop).
XY table
Closed loop thanks to integrated distance measurement
Stepping motor makes simple drive electronics possible
Air bearing free of wear
No externally measurable magnetic fields
Practically no heating up
Can be built in above head
Stator area up to 1000 x 1000 mm
Suitable for vacuums

Planar Motor LMPP
The planar motors of the LMPP series are suited for simple positioning without position control (open loop).

Inexpensive XY table
Stepping motor technology (2-phase)
Control electronics for stepping motors
Can be built in above head
Stator area up to 1000 x 1000 mm
Suitable for vacuums