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Spectroscopic ellipsometer
Auto SE HORIBA Scientific


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The Auto SE is a spectroscopic ellipsometer, manufactured by HORIBA Scientific. It enables automatic analysis of thin film samples with simple push button operation. In a few seconds, a complete analysis report is generated, containing information on thickness, optical constants, surface roughness, and film inhomogeneities.
The Auto SE features automatic XYZ stage, real-time imaging of the measurement site and an automated spot size selection.
The Auto SE is suitable for routine thin film measurement and device quality control.


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