spectroscopic ellipsometer
Smart SE HORIBA Scientific

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spectroscopic ellipsometer spectroscopic ellipsometer - Smart SE


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The instrument Smart SE is spectroscopic ellipsometer. Very fast and accurate thin film measurement can be done with the help of it. It has the ability to characterize the thin film thickness from minute 20µm, optical constants (n,k) and even properties of film such as roughness, optical grading and anisotropic layers. The DeltaPsi2 software platform enables the ellipsometric data to be analyzed of the range of 450 to 1000nm in a matter of seconds. Not only there is no compromise on the making of this instrument it is also very cost effective thin film R&D tool. It delivers research grade performance at a very feasible rate.
The following are the main features of this product:
An integration vision system is provided for accurate spot positioning.
Measurement of small features can be done to sizes ranging down a few tens of microns using seven automated micro spots.
It also has the ability to measure the complete 16-element Mueller matrix in just a few seconds. This is helps in studying complex samples.