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Spectroscopic ellipsometer
UVISEL 2 VUV HORIBA Scientific

Characteristics

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    spectroscopic

Description

The UVISEL 2 VUV is a ne generation of phase modulation ellipsometer for VUV measurement. It is the main spectroscopic ellipsometer available, intended to convey the quickest thin film measurements over the biggest wavelength range, from 147 to 2100 nm. The UVISEL 2 VUV is a half and half ellipsometer, fit for working in 2 modes, under nitrogen or essential vacuum. Its mechanical outline is improved for low nitrogen utilization down to 6l/min, and considers quick sample loading. The option of eight spot sizes is perfect for minimal area measurement and a promptly available chamber in front makes sample loading extremely suitable. It incorporates double high power vitality sources, high throughput optics, a Caf2 photograph flexible modulator and two advanced monochromators. The UVISEL 2 VUV gives high sensitivity at VUV wavelengths.

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