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Spectroscopic ellipsometer
190 - 2 100 nm | UVISEL HORIBA Scientific

High Precision R&D Spectroscopic Ellipsometer

The UVISEL ellipsometer range offers the best combination of modularity and performance for advanced thin film, surface and interface characterization.
Based on phase modulation technology, the UVISEL ellipsometer provides a powerful optical design to continuously cover the spectral range from 145 to 2100 nm. High quality data are delivered across the whole spectral range in terms of high accuracy, high resolution measurements and excellent signal to noise ratio.


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