Thermal mass flow controller SEC-Z500X series

for gasdigitalanalog

Multi Range/Multi Gas Digital Mass Flow Controller This is HORIBA's best selling model for digital mass flow controllers. It has multi-range/multi-gas functions enabling users to change the type of gas or full-scale flow rate on-site quickly and easily. With high accuracy +/- 1.0% S.P, piezo actuator valve, high speed response and being all-metal this mass flow controller is suitable for process yield improvement and simplified parts management. Digital/Analog, DeviceNet™, and EtherCAT® communications are all available. High Accuracy ±1.0% S.P. This mass flow controller's linearity is compensated by a polynomial approximated curve and achieves high accuracy for all flow control ranges. For the purpose of advancement of actual gas accuracy, the calibration data of various process gases are measured by HORIBA STEC's standard gas measurement system. High Speed Response Installed with the "Variable PID system", which can achieve 1 second response between any two set points. Variable PID is continuously changing depending on the flow point setting. This allows the PID factor to be optimized when the full scale flow and gases are changed. Multi-Gas/Multi-Range Solution The configuration software makes it possible to change specifications quickly and easily. One key feature is the changes can be made without removing the mass flow controller from the gas panel or piping. This reduces the number of spare mass flow controllers required; saving both time and costs. The Mass Flow Controller SEC-Z500X is suitable for various applications as well as semiconductor manufacturing.