Thermal mass flow meter D500 series

differential pressurefor gasin-line

Pressure Insensitive Mass Flow Module This leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve. The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal. Pressure Insensitive Performance A new high-performance Pressure Insensitive function provides a simplified gas supply system Multi-range, multi-gas, multi-pressure solution The new functions allow the user to change gas type, Full-scale flow rate, and supply pressure range G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function The advanced process health monitoring function allows operators to conduct their own tests, typically in three seconds or less for improved throughput High Accuracy Flow rate accuracy for process gas has been improved with an advanced three-dimensional adjustment Fast Response Response: < 0.8 second Accurate, stable flow control can be achieved Dynamic Range Wide control range: 0.2% F.S. to 100% F.S. "Recently, with the increase of application of a semiconductor device according to IoT, the latest semiconductor factories are focusing to minimize the downtime of the apparatus. Therefore, for the purpose of failure pre-detection of semiconductor tools and its components, the managed parameters of semiconductor process are increased, and its specification is getting tighter.