LCD monitor / rack-mount / industrial
CS-137 HORIBA STEC

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Characteristics

  • Technology:

    LCD

  • Mounting:

    rack-mount

  • Applications:

    industrial

Description

BHF Concentration Monitor, CS-137
CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
The CS-137 is a high-precision chemical solution concentration monitor designed to meet the strict demands of semiconductor wet-etching processes. Etching processes use BHF solution to etch silicon oxide and remove particles from the wafer surface. The CS-137 continually monitors each component of the BHF solution (NH4F/HF/H2O), alerting the user each time the solution is replaced or replenished. This allows you to maintain the concentration of the BHF solution within the required component ranges, while eliminating unnecessary solution replacement.