vaporizer
LE series HORIBA STEC

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vaporizer vaporizer - LE series
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Description

Large Flow Liquid Source Vaporization Control System LE Series
Large Flow Liquid Source Vaporization Control System LE Series Image
A high-flow, high-efficiency, liquid vaporizer with flow channels and heater elements embedded in a cast aluminium block which ensures maximum heat transfer, and the elimination of both cold spots and the risk of condensation. This Liquid Source Vaporization Control System can operate at up to 300 °C and can vaporize up to 30g/min of IPA (or equivalent).



Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC Co. Ltd.