DC bias current source
12 - 26 kW, max. 40 - 87 A | TruPlasma Bias 4000 series
Hüttinger Electronik
The TruPlasma Bias Series 4000 family is a versatile set of state-of-the-art pulsed DC bias generators. Pulse frequency up to 100 kHz as well as continuous bias output is possible.
Two operation modes support different applications, thereby providing an optimum process environment: a high voltage mode up to 1200 volts and a low voltage mode up to 300 volts. These modes are suited to assist in optical and metal coating processes as well as in pre-treatment and etching applications, for use e.g. in semiconductor and hard coating manufacturing. However, TruPlasma Bias Series 4000 can also be used for any application with similar voltage and current requirements.
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