High precision positioning table
TX series
IKO NIPPON THOMPSON America
IKOTX is a Super Positioning Table which realizes super high running accuracy and high load capacity by incorporated IKOLinear Roller Way Super X as its guidance component. Epoch-making 5-micron meter of positioning accuracy and 0.016 μm resolution are possible by full-closed-loop control system.
IKOCleanroom Precision Positioning Table TC is the most suitable for use in an environment requiring high cleanliness, for example, semiconductor manufacturing equipment and liquid crystal related equipment. Its unique high air-tightness structure seals the driving part and slide table guide part perfectly to prevent dust emission from the table to the surrounding environment. Three types of Cleanroom Precision Positioning Table are available. Slim type TC...US has super cleanliness and compactness with availability of motor holding back type. TC...U has a high rigidity bed with many options and TC...L has a full cover structure that ensures low noise and is excellent in corrosion resistance.
Precision Positioning Table TSMA/TSMS/CTMA is a simple structure light-weight ball screw driven positioning table which has single row of IKOLinear Way of broad width structure strong against moment, built into slide table and bed made of high strength aluminum alloy.
TSMA and TSMS are made into series, for which driving motors AC servo motor and 5-phase stepping motor is used respectively, and table composition corresponding to applications such as rolled thread, ground thread, and motor with brake can be selected.
IKOCleanroom Precision Positioning Table TC is the most suitable for use in an environment requiring high cleanliness, for example, semiconductor manufacturing equipment and liquid crystal related equipment. Its unique high air-tightness structure seals the driving part and slide table guide part perfectly to prevent dust emission from the table to the surrounding environment. Three types of Cleanroom Precision Positioning Table are available. Slim type TC...US has super cleanliness and compactness with availability of motor holding back type. TC...U has a high rigidity bed with many options and TC...L has a full cover structure that ensures low noise and is excellent in corrosion resistance.
Precision Positioning Table TSMA/TSMS/CTMA is a simple structure light-weight ball screw driven positioning table which has single row of IKOLinear Way of broad width structure strong against moment, built into slide table and bed made of high strength aluminum alloy.
TSMA and TSMS are made into series, for which driving motors AC servo motor and 5-phase stepping motor is used respectively, and table composition corresponding to applications such as rolled thread, ground thread, and motor with brake can be selected.
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