Piezoelectric positioning stage
SP Series
IKO NIPPON THOMPSON America
IKOPiezo Stage SP realizes a high resolution of "10nm" and a high positioning accuracy that can build up a high accuracy compact rough-motion / micromotion mechanism when combined with Precision Positioning Table.
IKOPiezo Stage SP is best suited for laser optical apparatus, semiconductor, LCD manufacturing equipment, and other control mechanisms that require complicated positioning operations.
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