For generating high and ultra-high vacuums SST turbomolecular pumps are
equipped with an integrated low vacuum stage.
Dry, solid-lubricated hybrid bearings with ceramic balls prevent the vacuum
being contaminated by oils, greases or their decomposition products.
The functional and design features are:
- Monobloc rotors with extremely low residual vibrations
- Special blade design for a high pumping speed and a high compression ratio, particularly for light gases
- The gap-free rotor structure gives fast degassing on the high vacuum side
- Fore-vacuum limiting pressure up to several mbars
- Oil free, so no self-generation of light gases from hydrocarbon cracking
products
- Any operating position
- Very quiet running, minimal noise level
- Maintenance free under normal operation
- Small dimensions, low weight
