In-situ gas analyzer
TRANSPECTOR CPM
INFICON
INFICON Transpector® CPM provides in situ early warnings and lowers costs by:
* measuring gas phase reactions
* verifying vacuum integrity
* identifying trace-level contaminants
* measuring process and background composition
* qualifying gas purity
The INFICON CPM Compact Process Monitor is a full-featured, compact and affordable gas analyzer that's ideally suited for in situ monitoring of complex processes. This dry-pumped system uses the proven technology of the INFICON Transpector 2 Gas Analysis System to help achieve new levels of performance.
