Wafer marking machine
IL C 3000
InnoLas
The IL C 3000 is a state of the art class 1 mini-environment marking system for 300 mm wafers. The system allows fully automated laser marking of polished 300 mm wafers in FOUP cassettes using our debris free processing techniques.
The integrated mini-environment has an ionization unit, and the flow is controlled by a differential pressure sensor.
The two station system can be loaded by the system operator or with an OHT (over head transport) system following the SEMI E84 standard.
The unique InnoLas Semiconductor designed 300 mm vacuum or Edge Grip handling (including aligner) is available. The system offers marking capability on the front and/or backside of the wafer.
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