Wafer sorter
IL C 3400
InnoLas
The IL 3400 wafer sorter / wafer inspection system is a multi functional tool to be used to sort, transfer and inspect 300mm wafers for various applications.
It is equipped with a class 1 mini environment with ionization unit and differential pressure sensor controlled flow.
The system uses a 300 mm "Edge Grip" handling and aligner unit. The versatile and compact 6 stations design allows various combinations of automatic FOUP openers, aligner and presenter units to be integrated.
The basic model has one reading unit (OCR, BC412, T7) for reading the code on the backside of the wafer.
A second reading unit (OCR, BC412, T7) for reading the code on the wafer frontside can be mounted as additional option.
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