Wafer test set
IL 2600
InnoLas
The InnoLas wafer sorting system IL 2600 can automatically sort, split merge and transfer wafer from any slot / cassette to any other slot / cassette in a six cassette array.
Wafer sizes from 100 mm to 200 mm can be handled without any mechanical adjustment in a single or multi-batch operation.
The laser mark code read for verification can be located at any position on the front and/or backside of the wafer.
The basic model has one reading unit (OCR, BC412, T7) for reading the laser code on the frontside of the wafer.
A second reading unit (OCR, BC412, T7) for reading the code on the backside of the wafer can be mounted as an option.
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