3D scanning touch probe for CMM
3 axis | AccuSurf InsituTec

The AccuSurf Gauging System incorporates a state-of-the-art nanometer repeatable rotary axis with a multi-axis active scanning head. This advanced gauging system provides the ability to measure complex 3D surface profiles with < 20 nm repeatability, is capable of high scanning speeds with 1000’s of data points collected per second, has scanning forces less than 100 nN.

The AccuSurf gauge when accompanied with the MicroTouch Sensor System will extend, the functionality of a CMM to enable microscale form measurements, nanoscale surface metrology, and roundness, tasks that would otherwise require 3 different machines. This provides ability to measure shapes and parts that were otherwise difficult to measure such as freeform optics, inside channels and cavities of MEMS and soft exotic materials such as aerogels and roots of miniature threads.