Piezoelectric nanopositioning stage / XYZ
max. 50 µm | PSX50Y50Z50 InsituTec

Characteristics

  • Technology:

    piezoelectric

  • Type:

    XYZ

Description

The PSX50Y50Z50 stages are compact 3-axis stages designed to seemlessly integrate into metrology applications, nano-scale machines, optical alignment, laser measurement, x-ray metrology, nano-automation, and research applications.

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Piezoelectric Stages