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Linear nanopositioning stage / XYZ / piezoelectric / 3-axis
PSX50Y50Z50.AL.CS InsituTec

Characteristics

  • Orientation:

    linear, XYZ

  • Type:

    piezoelectric

  • Number of axes:

    3-axis

  • Stroke :

    Min.: 0 µm

    Max.: 50 µm

Description

The PSX50Y50Z50 stages are compact 3-axis stages designed to seemlessly integrate into metrology applications, nano-scale machines, optical alignment, laser measurement, x-ray metrology, nano-automation, and research applications.

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