XYZ nanopositioning stage / piezoelectric
max. 50 µm | PSX50Y50Z50 InsituTec

Characteristics

  • Number of axes:

    XYZ

  • Technology:

    piezoelectric

Description

The PSX50Y50Z50 stages are compact 3-axis stages designed to seemlessly integrate into metrology applications, nano-scale machines, optical alignment, laser measurement, x-ray metrology, nano-automation, and research applications.

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