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  1. Power Transmission - Mechanical components
  2. Actuator and Positioning System
  3. XY positioning stage
  4. IntelLiDrives, Inc.

Rotary stage XY-OF-UL-350x350+ACR335UT
XY2-axisopen-frame

rotary stage
rotary stage
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Go to the IntelLiDrives, Inc. website for more information

Characteristics

Orientation
XY, rotary
Number of axes
2-axis
Other characteristics
open-frame, for wafer handling
Stroke

350 mm
(13.78 in)

Speed

400 mm/s, 800 mm/s

Description

Open-frame low profile XY-Rotary stages designed for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear unobstruced access to the wafer from both sides.

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Go to the IntelLiDrives, Inc. website for more information

Other IntelLiDrives, Inc. products

OPEN FRAME XY-ROTARY SYSTEMS

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.
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