SCARA robot IWH Series 1
for wafer handling

SCARA robot
SCARA robot
SCARA robot
SCARA robot
SCARA robot
SCARA robot
SCARA robot
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Characteristics

Type
SCARA
Function
for wafer handling
Payload

Min.: 0 kg
(0 lb)

Max.: 1 kg
(2.205 lb)

Repeatability

0.02 mm
(0.0008 in)

Description

Series 1 robots are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules from 10.5" to 28". Handling weights of up to 3 kg are also possible with the appropriate combination of axes.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.