SCARA robot / for wafer handling / for clean rooms
IWH Series 1 isel



  • Type:


  • Function:

    for wafer handling

  • Field:

    for clean rooms

  • Payload:

    Min.: 0 kg (0 lb)

    Max.: 3 kg (6.614 lb)

  • Repeatability:

    0.02 mm


Series 1 wafer handlers robots
are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules from 10.5" to 28". Handling weights of up to 3 kg are also possible with the appropriate combination of axes...


Excellent strucutural rigidity
Maximum reliability and precision
Top mounted (TA) or bottom mounted (BA) versions available
Customized designs
Absolute or incremental encoder
Seamless integration with prealigner, linear track and other periphal
Including "Standard" or "Advanced" Hard- & Software
ISO 1 clean-room environment compatible
Made in Germany