Thin-film thermal mass flow sensor for liquids and gas
0.001 - 100 m/s, -40 ... +450 °C IST AG

Thermal mass flow sensor
Sensors for gases (liquids upon request)
Response time: <10 ms...<2 s
Large dynamic flow range : 0.001 m/s...100 m/s
High sensitivity
Easy to implement, simple electronics
Excellent long-term stability
Temperature range: -40°C to 450°C
Development of customized sensor layouts for both high and low volume applications

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