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PVD deposition machine / sputtering / online
iLS-920 ISYS

Characteristics

  • Method:

    PVD

  • Technology:

    sputtering

  • Other characteristics:

    online

Description

Features
In line system suitable to large size sheets and blades
High productivity and reliable system
High yield target erosion (Cr : more than 40%)
Large area plasma cleaning method
Fully automation coating and internet access
Data compiling & real time graph
System size : 14m(L) x 3m(W) x 2.5m(H)

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