XYZ positioning stage
max. 320 x 320 x 100 mm | PT15
ITK Dr. Kassen
- x- and y-axis with powerful direct drive
- z-axis optionally with glossary termST7 or glossary termST12
- high resolution optical measuring system
- repeatability 0,1µm
- max. velocity 1m/s
- max. acceleration 10m/s²
- precise GMR end switches
- iron-free linear motors
- high-quality internal cable chain for continuous operation
- clean room compatible
- assembly easy to maintain
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