0.15 MPa | PDS series
Superior resist handling
The use of high-torque, stepper motor technology results in a consistent controllable discharge volume. The discharge volume is not affected by changes in viscosity or by filter performance. Repeatable accuracy of 0.3% of the discharge volume is maintained at all times.
* Repeated precision: ±0.3% (F.S.)
* Linearity: ±0.5% (F.S.)
* Resolution: 0.01 ml or below
The pump end utilizes a tubephragm design eliminating dead volume and low velocity areas where resist can stagnate. This prevents the collection of particles and allows the pumps to maintain the highest purity possible.
Flexibility in Applications
The discharge velocity as well as volume are easily adjusted to expand the capabilities to many resist-coating processes, including the application of small amounts of resist in a short period of time.