chemical pump / pneumatic / bellows / for the semiconductor industry



  • Media:

    for chemicals

  • Operation:


  • Type:


  • Domain:

    for the semiconductor industry

  • Other characteristics:

    chemical process, high-pressure, high-temperature, metering

  • Flow:

    Min.: 25 l/min (6.6 us gal/min)

    Max.: 50 l/min (13.21 us gal/min)


Whether your application requires high pressure or high temperature, the FW-H universal temperature pump will meet your needs! High purity and exceptional performance are central to the design mission of these pumps - in fact, the pumps are manufactured in a class 10,000 clean room environment.

Temperature range of 10-180°C accomodates almost any application.Internal bellows design allows for higher pressure ratings by eliminating the failure points of traditional flat diaphragms and extending the pump's service life.

Innovative clamp design allows for field repair, greatly reducing maintenance costs.

Accurate, predictable flow rate is provided by "smart sensors" that control air via proximity sensors: no separate flow meter is necessary.

Reliable leak detection feature provides for "lights out" operation without fear of contaminating wet bench chemistry.