chemical pump / pneumatic / bellows / industrial
high-flow, vertical, circulation, unloading, for cleaning, drum
Min.: 2 l/min (0.5283 us gal/min)
Max.: 40 l/min (10.5669 us gal/min)
Min.: 0 Pa (0 psi)
Max.: 400,000 Pa (58.015 psi)
Features of FA series
There are two standardized models; the FA-2E, a lateral type for a low flow rate, and the FA-40VEW, a vertical type for a high flow rate. The FA-2E employs a spray system for single wafer processing while the FA-40VEW is suitable for cleaning 200/300 mm wafers.
H-shaped thick bellows are used (Only FA-40VEW). They have excellent resistance to high pressure and a long life to withstand continuous long-time operation. When connected to a special controller, the discharge can be controlled and monitored easily.