chemical pump / pneumatic / bellows / industrial
high-flow, control, high-pressure
Max.: 100 l/min (26.4172 us gal/min)
Min.: 80 l/min (21.1338 us gal/min)
Max.: 700,000 Pa (101.526 psi)
Min.: 0 Pa (0 psi)
High stroke speed
The pump’s fast stroke speed（Max. 200spm：FS-80N） allows compactness, light weight and low cost while enabling high flow & pressure capabilities.
All wet ends are made of fluororesin to give contamination-free construction. Our unique shaft seal also dramatically reduces particle generation (Patent-protected: FS-80N).
High flow & pressure capabilities
The maximum supply air pressure of 0.7MPa meets not only the demand for high flow & pressure capabilities in chemical supply processes but also requirements in cleaning/CMP processes.
Built-in proximity sensors open/close the solenoid valve. Flow rate control can be assured and facilitated when they are used with our controllers.