chemical pump / pneumatic / bellows / industrial
FS-100HT2 IWAKI

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Characteristics

  • Media:

    for chemicals

  • Operation:

    pneumatic

  • Type:

    bellows

  • Domain:

    industrial

  • Other characteristics:

    for hydrogen, circulation, high-temperature

  • Flow:

    Min.: 0 l/min (0 us gal/min)

    Max.: 100 l/min (26.4172 us gal/min)

  • Pressure:

    Min.: 0 Pa (0 psi)

    Max.: 500,000 Pa (72.519 psi)

Description


Enhanced cleaning efficiency

Cleaning efficiency such as the removal of particles and metal contamination on wafers is improved as the circulation flow rate is increased. Cleaning times resulting from increased number of processing lines will also be reduced due to higher circulation rate.
Contamination-free

In addition to the use of fluoroplastic wet ends (PTFE and PFA), a fluorine coating on the pump’s outer surfaces offers the best resistance to vapors from acid, alkali and hydrogen peroxide chemistries used in semiconductor manufacturing.
Reduced installation area

In addition to the use of fluoroplastic wet ends (PTFE and PFA), a fluorine coating on the pump’s outer surfaces offers the best resistance to vapors from acid, alkali and hydrogen peroxide chemistries used in semiconductor manufacturing.
Weight saving

Optimization of design has resultind in reduced weight of about 15% of our existing 80-100L models making installation and replacement work easier.