Laser interferometer
ZLM 900 3D
JENAer Meßtechnik
The most efficient interferometer of its kind world-wide.
* 3-axis heterodyne interferometer for position measurement, Pitch and yawangle, triangulation
* Highly flexible calibration module for CNC-Calibration
* Dynamic measurements up to 4m/s
* Standard resolution 1nm (Position), 0,01’’ (Angle)
* Accuracy <50nm/m (by highly precision temperature sensors)
* For Notebook, PCI- und PXI-Bus compatible, Network-compatible
* Quick adjustment, also in 3D
* Real-time measurements of all 3 axes
* Expandable up to 6 axes
* Small reflectors
* externally triggered up to 40 MHz
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