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Electron beam lithography system
JBX-5500FS Jeol

  • electron beam lithography system JBX-5500FS Jeol
The new JBX-5500FS is a cost-effective, high resolution direct write tool that is PC-controlled and simple to use. A spot beam, vector scan system, the JBX-5500FS writes patterns at a minimum line width of 10nm at 50kV.

The JBX-5500FS can achieve writing accuracies in two separate modes:

* High Resolution Mode: Overlay accuracy of < 40nm (3 sigma) can be achieved at 50kV.
* High Speed Mode: High speed mode allows 1mm fields at 50kV or 2mm at 25kV.

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