Field emission scanning electron microscope JSM-7610F
for analysisdigital cameraultra-high resolution

field emission scanning electron microscope
field emission scanning electron microscope
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Characteristics

Type
field emission scanning electron
Technical applications
for analysis
Other characteristics
digital camera, ultra-high resolution
Magnification

Min.: 25 unit

Max.: 1,000,000 unit

Resolution

1 nm, 1.3 nm, 3 nm

Description

JSM-7610F is an ultra high resolution Schottky Field Emission Scanning Electron Microscope which has semi-in-lens objective lens. High power optics can provide high throughput and high performance analysis. It’s also suitable for high spatial resolution analysis. Furthermore, Gentle Beam mode can reduce the incident electron penetration to the specimen, enabling you to observe its topmost surface by using a few hundred landing energy. High resolution imaging and high performance analysis by semi-in-lens objective lens The JSM-7610F combines two proven technologies – an electron column with semi-in-lens objective lens which can provide high resolution imaging by low accelerating voltage and an in-lens Schottky FEG which can provide stable large probe current – to deliver ultrahigh resolution with wide range of probe currents for all applications (A few pA to more than 200 nA). The in-lens Schottky FEG is a combination of a Schottky FEG and the first condenser lens and is designed to collect the electrons from the emitter efficiently. The topmost surface imaging at low accelerating voltage by Gentle Beam mode (GB) The Gentle Beam (GB) mode applies a negative voltage to a specimen and decelerates incident electrons just before they irradiate the specimen, thus the resolution is improved at an extremely low accelerating voltage. Therefore, 7610F is possible to observe a topmost surface by a few hundred eV which were difficult to observe conventionally and nonconductive samples such as ceramics and semiconductor etc.

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