Wafer inspection machine
JFAS-7000BT
Jeol
The Beam Tracer is a scanning electron microscope incorporating a highly accurate mechanical probe to successfully image micro areas needed for development of 45 nm and 32 nm node devices. Defect positions are identified from various images obtained from the electron beam generated from the probe, including absorbed current contrast (current or voltage detection mode), EBIC, and potential images.
Specific interconnects and contacts may be focused by the probe to test electrical properties of a single device.
