SCARA robot / 4-axis / 5-axis / handling
Kawasaki Robotics GmbH
Number of axes:
industrial, for clean rooms, for electronics, solar, for the electronics industry
1,230 mm, 1,250.7 mm, 1,280 mm
The NT series clean robot is designed to give a single robot the reach to tend up to four FOUPs without using a linear axis. The NT series incorporates the next-generation design to handle either 300 mm or 450 mm wafers at a rate of 400 wafers per hour (WPH) without an aligner.