Motorized XYZ stage
KML Linear Motion Technology GmbH
- compact dimensions
- high dynamics to achieve short cycle times
- high system and repeatability within nanometer range
- resistant to high temperature of the system over a certain time interval
- the sag of the Z-axis execution must be prevented in case of a voltage failure
- clean room suitable version
- execution of the function and quality assurance by the supplier
Solution
To meet the requirements of the product concept catalogue the construction was arrange as follows:
- special geometrical dimensions
- structure by FEM (finite elements method) construed and optimized
- use of particularly coated composite materials
- use of clean room suitable materials and/or coatings
- temperature-compensated length measuring systems
- high performance linear motors with small heat dissipation
- magnetic mass balance in the Z-axis
- IKO ultra precision linear ways with clean room grease filling
- work piece holding by compressed air and evacuated system
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