KOFLOC 5400
The KOFLOC Low-Cost Metal-Sealed Mass Flow Controller/Meter MODEL 5400 SERIES is a cost-effective, high-performance gas mass flow controller/meter, with focus on dependability, low-leak and non-welding structure required in semiconductor processes. It has gained wide acceptance and solid reputation for its flexibility. MODEL 5400 SERIES meets or surpasses standard performance requirement of no-welding, metal seal, 1% accuracy at full scale and response time of 1 s or less at full scale in gas control of semiconductor processes. This mass flow controller/ meter has achieved low-cost on top of all these. The MODEL 5400 SERIES stands out is its general usefulness in a wide and varying fields from CCFL production to bioethanol evaluation using an ICP-MS.
FEATURES
Rohs compliance
CE mark
SEMI stndard connections
SUS316L stainless steel
Unidirectional normally closed valve
Highly reliable solenoid actuator
Compact & Low-Cost
Standard dimensions and fittings for easy replacement
Free mounting position
Wide selection of fittings, seals, wetted materials and communication interfaces
Easy maintenance
APPLICATIONS
Air sampling
Analyzer component
Bioreactor
Biotechnological process
CCFL manufacturing
Chamber pressure control
Chemical process
Environment monitoring
Electronic device manufacturing
Food production
Fuel cell testing
Fermentation process
Gas generation
Industrial furnace
Leak testing
Pharmaceutical process
Process flow control
R&D
Solar power element manufacturing
Secondary calibration reference
Semiconductor process
Sputter deposition
Surface treatment process
Thermal flame spray
Thin film manufacturing
Vacuum apparatus
Vapor deposition
