Koyo Thermos Systems
Group: Koyo Seiko
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Infrared furnace for FPD production
80 - 250 °C | CCBS-IR Koyo Thermos Systems

  • infrared furnace for FPD production 80 - 250 °C | CCBS-IR Koyo Thermos Systems
Clean structure with no dust caused by itself
Far-infrared radiation(IR) heating system has been adopted.
The process with high efficiency is available for various kinds of the film thickness.
The IR panel heater with excellent temperature uniformity has been adopted.
The uniform heating is available for such a large substrate as the 10th Generation.
By introducing N2 gas into the oven, it is available to have a heating process under low Oxygen(O2) density.



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